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Three-dimensional patterning in polymer optical waveguides using focused ion beam milling
Kruse, Kevin, Burrell, Derek, Middlebrook, ChristopherVolume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.15.3.034505
Date:
August, 2016
File:
PDF, 3.78 MB
english, 2016