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Nitroxide-mediated polymerization of adamantyl-functional methacrylates for 193 nm photoresists
Marić, Milan, Seok, Juliana, Métafiot, Adrien, Wylie, KevinVolume:
95
Language:
english
Journal:
The Canadian Journal of Chemical Engineering
DOI:
10.1002/cjce.22726
Date:
April, 2017
File:
PDF, 2.63 MB
english, 2017