A comprehensive simulation model of the performance of photochromic films in absorbance-modulation-optical-lithography
Majumder, Apratim, Helms, Phillip L., Andrew, Trisha L., Menon, RajeshVolume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4944489
Date:
March, 2016
File:
PDF, 5.90 MB
english, 2016