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[ASME ASME 2003 International Mechanical Engineering Congress and Exposition - Washington, DC, USA (November 15–21, 2003)] Microelectromechanical Systems - Design Optimization of a Novel, Large-Displacement, Multi-Axis, Silicon/Polymer Hybrid Actuator for Micro Optics
Tung, Yi-Chung, Kim, Jeong-Gil, Kurabayashi, KatsuoVolume:
2003
Year:
2003
Language:
english
DOI:
10.1115/imece2003-41174
File:
PDF, 329 KB
english, 2003