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Facile Batch Fabrication of Hydrogel Atomic Force Microscope Cantilevers via Capillary Filling and Ultraviolet Curing in an Aligned Elastomeric Mold Pair
Kim, Seokbeom, Song, Jungki, Cho, Sang-Joon, Lee, JungchulYear:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2675946
File:
PDF, 1.51 MB
english, 2017