![](/img/cover-not-exists.png)
Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators
Segovia-Fernandez, Jeronimo, Piazza, GianlucaYear:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2672962
File:
PDF, 1.78 MB
english, 2017