Thermoelastic Damping in the Electrodes Determines $Q$ of...

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Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators

Segovia-Fernandez, Jeronimo, Piazza, Gianluca
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Year:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2672962
File:
PDF, 1.78 MB
english, 2017
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