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Integration of Ta–N Thin Film Resistors on Anodic Alumina MCM-D Substrate
Zhu, Dapeng, Lin, Xiaoqin, Luo, LeVolume:
131
Year:
2009
Language:
english
Journal:
Journal of Electronic Packaging
DOI:
10.1115/1.3068305
File:
PDF, 508 KB
english, 2009