Possible applications of scanning frequency comb microscopy...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 03 Vol. 33; Iss. 2

Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors

Hagmann, Mark J., Andrei, Petru, Pandey, Shashank, Nahata, Ajay
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4905095
Date:
March, 2015
File:
PDF, 963 KB
english, 2015
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