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Facile synthesis of AlO x dielectrics via mist-CVD based on aqueous solutions
Oh, Keun-Tae, Kim, Hyo-yeon, Kim, Dong-hyun, Han, Jeong Hwan, Park, Jozeph, Park, Jin-SeongLanguage:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2017.04.031
Date:
April, 2017
File:
PDF, 953 KB
english, 2017