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Optical emission spectroscopy during the deposition of zirconium dioxide films by controlled reactive high-power impulse magnetron sputtering
Pajdarová, Andrea Dagmar, Vlček, Jaroslav, Rezek, JiříVolume:
121
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4977822
Date:
May, 2017
File:
PDF, 2.28 MB
english, 2017