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An experimentally verified model for thermal microactuators including nonlinear material properties, vacuum, and intra-device heat conduction
Colbert, Keegan, Naraghi, Mohammad, Boyd, James GVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa51ed
Date:
February, 2017
File:
PDF, 2.34 MB
english, 2017