SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications - Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators
O'Hara, Anthony, Bailey, Wayne, Motamedi, M. Edward, Rankin, Iain D., Begbie, Mark L., Luo, Fang-Chen, Vass, David G., Burns, D. C., Underwood, Ian, Stevenson, J. Tom M.Volume:
2641
Year:
1995
Language:
english
DOI:
10.1117/12.220934
File:
PDF, 799 KB
english, 1995