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Nearest neighbor difference rule-based kernel principal component analysis for fault detection in semiconductor manufacturing processes
Zhang, Cheng, Gao, Xianwen, Xu, Tao, Li, YuanYear:
2017
Language:
english
Journal:
Journal of Chemometrics
DOI:
10.1002/cem.2888
File:
PDF, 1.68 MB
english, 2017