[Computer Aided Chemical Engineering] Chemical Product Design: Toward a Perspective Through Case Studies Volume 23 || Epitaxial Silicon Wafers using Plasma-Enhanced, Chemical-Vapor-Deposition
Sinno, TalidYear:
2007
Language:
english
DOI:
10.1016/s1570-7946(07)80013-7
File:
PDF, 430 KB
english, 2007