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A Relative Permittivity-based Air Pressure Sensor Using Standard CMOS Process
Kang, John H., Park, Sujin, Cho, SeongHwanYear:
2017
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2017.2695124
File:
PDF, 1.97 MB
english, 2017