SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 28 January 2017)] Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XXI - In-situ metrology in multiwafer reactors during MOVPE of AIN-based UV-LEDs (Conference Presentation)
Kim, Jong Kyu, Krames, Michael R., Tu, Li-Wei, Strassburg, Martin, Knauer, Arne, Brunner, Frank, Kolbe, Tim, Hagedorn, Sylvia, Kueller, Viola, Weyers, MarkusVolume:
10124
Year:
2017
Language:
english
DOI:
10.1117/12.2253867
File:
PDF, 121 KB
english, 2017