Development of a detachable high speed miniature scanning...

Review of Scientific Instruments 2015 / 11 Vol. 86; Iss. 11

Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection

Sadeghian, Hamed, Herfst, Rodolf, Winters, Jasper, Crowcombe, Will, Kramer, Geerten, van den Dool, Teun, van Es, Maarten H.
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Volume:
86
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4936270
Date:
November, 2015
File:
PDF, 5.28 MB
english, 2015
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