Capturing H and H 2 by SiH x + ( x ≤ 4) ions: Comparison between Langevin and quantum statistical models
Nguyen, Trong-Nghia, Lee, Yun-Min, Wu, Jong-Shinn, Lin, Ming-ChangVolume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.026101
Date:
February, 2017
File:
PDF, 603 KB
english, 2017