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Bistability in a symmetric out-of-plane microstructure
Lucas, T. M., Porter, D. A., Beharic, J., Berfield, T. A., Harnett, C. K.Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2992-2
Date:
July, 2017
File:
PDF, 1.38 MB
english, 2017