A curved edge diffraction-utilized displacement sensor for...

Review of Scientific Instruments 2016 / 07 Vol. 87; Iss. 7

A curved edge diffraction-utilized displacement sensor for spindle metrology

Lee, ChaBum, Mahajan, Satish M., Zhao, Rui, Jeon, Seongkyul
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Volume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4958882
Date:
July, 2016
File:
PDF, 4.21 MB
english, 2016
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