Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
Hoffmann, Lukas, Theirich, Detlef, Hasselmann, Tim, Räupke, André, Schlamm, Daniel, Riedl, ThomasVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935337
Date:
January, 2016
File:
PDF, 735 KB
english, 2016