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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Modeling 2D and 3D periodic nanostructuring of materials with ultrafast laser pulses (Conference Presentation)
Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Colombier, Jean-Philippe, Rudenko, Anton, Bévillon, Emile, Zhang, Hao, Itina, Tatiana E., Stoian, RazvanVolume:
10091
Year:
2017
Language:
english
DOI:
10.1117/12.2257473
File:
PDF, 124 KB
english, 2017