Macroparticles formation in cathodic arc deposition of nitride coatings from TiNb alloy cathodes
Dumitriu LaGrange, Daniela, LaGrange, Thomas, Santana, Antonio, Jähnig, Raiko, Karimi, AyatVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4975638
Date:
March, 2017
File:
PDF, 5.07 MB
english, 2017