SPIE Proceedings [SPIE Smart Materials and MEMS -...

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SPIE Proceedings [SPIE Smart Materials and MEMS - Melbourne, Australia (Wednesday 13 December 2000)] Smart Materials - Directly electroplated microstructure

Wilson, Alan R., Muscat, Richard F., Jackson, Ian, Olsson-Jacques, Christina, Retchford, John, Wilson, Alan R., Asanuma, Hiroshi
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Volume:
4234
Year:
2001
Language:
english
DOI:
10.1117/12.424414
File:
PDF, 132 KB
english, 2001
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