Surface evolution and stability transition of silicon wafer...

AIP Advances 2017 / 03 Vol. 7; Iss. 3

Surface evolution and stability transition of silicon wafer subjected to nano-diamond grinding

Cai, Shisheng, Zhang, Changxing, Li, Haicheng, Lu, Siyuan, Li, Yan, Hwang, Keh-Chih, Feng, Xue
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Volume:
7
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4979579
Date:
March, 2017
File:
PDF, 11.38 MB
english, 2017
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