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Process for patterning features in poly(acrylic acid) for microelectronic applications
Feng, Ying, Smith, Connor S, Burkett, Susan LVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa6673
Date:
May, 2017
File:
PDF, 1.62 MB
english, 2017