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Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles
Arakane, S, Mizoshiri, M, Sakurai, J, Hata, SVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa6820
Date:
May, 2017
File:
PDF, 2.26 MB
english, 2017