Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 03 Vol. 35; Iss. 2
Top-down technique for scaling to nano in silicon MEMS
Yilmaz, Mustafa, Kilinc, Yasin, Nadar, Gokhan, Tasdemir, Zuhal, Wollschläger, Nicole, Österle, Werner, Leblebici, Yusuf, Alaca, B. ErdemVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4978047
Date:
March, 2017
File:
PDF, 1.85 MB
english, 2017