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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Thin film ruthenium microstructures for transition edge sensors
Lukichev, Vladimir F., Rudenko, Konstantin V., Ilin, A. S., Cohn, I. A., Vystavkin, A. N., Kovalenko, A. G.Volume:
10224
Year:
2016
Language:
english
DOI:
10.1117/12.2266275
File:
PDF, 742 KB
english, 2016