Theoretical simulation of backscattered electron images of Si/SixGe1-xstructures with a scanning electron microscope
Angela C. De Riccardis, Pier Giorgio Merli, Michele Nacucchi, Leander TapferVolume:
114-115
Year:
1994
Language:
english
Pages:
6
DOI:
10.1007/bf01244551
File:
PDF, 304 KB
english, 1994