Combined EPMA and AES depth profiling of a multilayer...

Microchimica Acta 1994 Vol. 114-115; Iss. 1

Combined EPMA and AES depth profiling of a multilayer Ti-Al-O-N coating

Alexander von Richthofen, Michitaka Matsuo, Peter Karduck, Norbert Ammann
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Volume:
114-115
Year:
1994
Language:
english
Pages:
13
DOI:
10.1007/bf01244578
File:
PDF, 682 KB
english, 1994
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