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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 28 August 2016)] Reflection, Scattering, and Diffraction from Surfaces V - The design of microscope type spectral reflectometry for the depth measurement of high-aspect-ratio through silicon via
Hanssen, Leonard M., Wei, Hsiang-Chun, Lo, Chun-Wei, Liu, Chih-ShangVolume:
9961
Year:
2016
Language:
english
DOI:
10.1117/12.2238042
File:
PDF, 1.18 MB
english, 2016