Improvement in electrical properties of high-...

Chinese Physics B 2016 / 02 Vol. 25; Iss. 2

Improvement in electrical properties of high- κ film on Ge substrate by an improved stress relieved pre-oxide method

Fan, Ji-Bin, Ding, Xiao-Fu, Liu, Hong-Xia, Xie, Peng-Fei, Zhang, Yuan-Tao, Liao, Qing-Liang
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Volume:
25
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/25/2/027702
Date:
February, 2016
File:
PDF, 760 KB
english, 2016
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