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[ASME ASME 2010 International Mechanical Engineering Congress and Exposition - Vancouver, British Columbia, Canada (November 12–18, 2010)] Volume 10: Micro and Nano Systems - Development of LIGA-Like Process With Positive Photoresist and SU-8
Lee, Yongsu, Kim, Jinha, Lee, Seokwoo, Lee, SeungsubYear:
2010
Language:
english
DOI:
10.1115/imece2010-38379
File:
PDF, 1.12 MB
english, 2010