Quantitative Evaluation of Cobalt Disilicide/Si Interfacial...

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 5

Quantitative Evaluation of Cobalt Disilicide/Si Interfacial Roughness

Yang, Jing, Feng, Jun, Li, Kecheng, Bhandari, Harish B., Li, Zhefeng, Gordon, Roy G.
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0271705jss
File:
PDF, 630 KB
english, 2017
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