Interpretation of Auger depth profiles of thin SiC layers...

Microchimica Acta 1997 Vol. 125; Iss. 1-4

Interpretation of Auger depth profiles of thin SiC layers on Si

Gernot Ecke, Hans Rößler, Volker Cimalla, Jörg Pezoldt
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Volume:
125
Year:
1997
Language:
english
Pages:
4
DOI:
10.1007/bf01246186
File:
PDF, 321 KB
english, 1997
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