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Investigation of Al diffusion in different oxide thin-film layers by SNMS/HFM method
Hubert Paulus, Susanne Kornely, Janos Giber, Karl -Heinz MüllerVolume:
125
Year:
1997
Language:
english
Pages:
5
DOI:
10.1007/bf01246187
File:
PDF, 421 KB
english, 1997