Massive-scale molecular dynamics of ion-irradiated III–V...

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Massive-scale molecular dynamics of ion-irradiated III–V compound semiconductors at the onset of nanopatterning

Lively, Michael A., Holybee, Brandon, Toriyama, Michael, Allain, Jean Paul
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Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2017.04.047
Date:
April, 2017
File:
PDF, 3.16 MB
english, 2017
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