Low specific contact resistance on epitaxial p-type 4H-SiC...

Chinese Physics B 2015 / 11 Vol. 24; Iss. 11

Low specific contact resistance on epitaxial p-type 4H-SiC with a step-bunching surface

Han, Chao, Zhang, Yu-Ming, Song, Qing-Wen, Tang, Xiao-Yan, Zhang, Yi-Men, Guo, Hui, Wang, Yue-Hu
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Volume:
24
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/24/11/117304
Date:
November, 2015
File:
PDF, 2.49 MB
english, 2015
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