[IEEE ISAF '96. Tenth IEEE International Symposium on Applications of Ferroelectrics - East Brunswick, NJ, USA (18-21 Aug. 1996)] ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics - Resistance degradation of CVD (Ba,Sr)TiO/sub 3/ thin films for DRAMs and integrated decoupling capacitors
Basceri, C., Wells, M.A., Streiffer, S.K., Kingon, A.I., Bilodeau, S., Carl, R., Van Buskirk, P.C., Summerfelt, S.R., McIntyre, P.Volume:
1
Year:
1996
Language:
english
DOI:
10.1109/isaf.1996.602709
File:
PDF, 367 KB
english, 1996