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Optimization of Resistance Uniformity by the Surface Oxidation of Tantalum Nitride for Thin Film Resistors
Woo, Jong-Chang, Kang, Pil-Seung, Kim, Chang-IlVolume:
16
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.13691
Date:
December, 2016
File:
PDF, 3.72 MB
english, 2016