Low Temperature Growth of Piezoelectric Films by RF...

Japanese Journal of Applied Physics 1981 / 01 Vol. 20; Iss. S3

Low Temperature Growth of Piezoelectric Films by RF Reactive Planar Magnetron Sputtering

Shiosaki, Tadashi, Yamamoto, Takashi, Oda, Takafumi, Harada, Kazushige, Kawabata, Akira
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Volume:
20
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.20S3.149
Date:
January, 1981
File:
PDF, 440 KB
english, 1981
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