Wafer-scale epitaxial lift-off of GaN using bandgap-selective photoenhanced wet etching
Youtsey, Chris, McCarthy, Robert, Reddy, Rekha, Forghani, Kamran, Xie, Andy, Beam, Ed, Wang, Jingshan, Fay, Patrick, Ciarkowski, Timothy, Carlson, Eric, Guido, LouisLanguage:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201600774
Date:
April, 2017
File:
PDF, 1.59 MB
english, 2017