Towards scalable capacitive cantilever arrays for emerging...

Sensors and Actuators A: Physical 2017 / 06 Vol. 260

Towards scalable capacitive cantilever arrays for emerging biomedical applications

Ghafar-Zadeh, Ebrahim, Ayala-Charca, Giancarlo, Gholamzadeh, Bahareh, Ghasemi, Somayeh, Magierowski, Sebastian
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Volume:
260
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.04.014
Date:
June, 2017
File:
PDF, 3.36 MB
english, 2017
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