[ASME ASME 2010 International Mechanical Engineering...

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[ASME ASME 2010 International Mechanical Engineering Congress and Exposition - Vancouver, British Columbia, Canada (November 12–18, 2010)] Volume 4: Electronics and Photonics - Micro Texture Dependence of Both the Mechanical and Electrical Properties of Electroplated Copper Thin Films Used for Interconnection

Murata, Naokazu, Saito, Naoki, Tamakawa, Kinji, Suzuki, Ken, Miura, Hideo
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Year:
2010
Language:
english
DOI:
10.1115/IMECE2010-37279
File:
PDF, 2.65 MB
english, 2010
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