Simulation of capacitive pressure sensor based on...

ARCHIVE Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science 1989-1996 (vols 2017 / 04

Simulation of capacitive pressure sensor based on microelectromechanical systems technology

Baghelani, Masoud, Hosseini-Sianaki, Ahmad, Behzadi, Zeinab, Mirabdolah Lavasani, Arash
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Language:
english
Journal:
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
DOI:
10.1177/0954406217706095
Date:
April, 2017
File:
PDF, 895 KB
english, 2017
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