Investigation of porous Si formed by metal-assisted...

Journal of Physics Conference Series 2017 / 04 Vol. 829

Investigation of porous Si formed by metal-assisted chemical etching with Au as catalyst

Pyatilova, O., Gavrilov, S., Savitskiy, A., Dudin, A., Pavlov, A., Shilyaeva, Yu
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Volume:
829
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/829/1/012006
Date:
April, 2017
File:
PDF, 1.04 MB
english, 2017
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