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Study on Positive–Negative Inversion of Chlorinated Resist Materials
Oyama, Tomoko Gowa, Oshima, Akihiro, Yamamoto, Hiroki, Tagawa, Seiichi, Washio, MasakazuVolume:
4
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.4.076501
Date:
June, 2011
File:
PDF, 669 KB
english, 2011