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Effect of electron beam injection on boron redistribution in silicon and oxide layer
Qin, Shiqiang, Tan, Yi, Li, Jiayan, Jiang, Dachuan, Wen, Shutao, Shi, ShuangVolume:
35
Language:
english
Journal:
Materials Science-Poland
DOI:
10.1515/msp-2017-0027
Date:
January, 2017
File:
PDF, 504 KB
english, 2017