Effect of electron beam injection on boron redistribution...

Effect of electron beam injection on boron redistribution in silicon and oxide layer

Qin, Shiqiang, Tan, Yi, Li, Jiayan, Jiang, Dachuan, Wen, Shutao, Shi, Shuang
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Volume:
35
Language:
english
Journal:
Materials Science-Poland
DOI:
10.1515/msp-2017-0027
Date:
January, 2017
File:
PDF, 504 KB
english, 2017
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