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Synthesis and Characterization of Porogen Based Porous Low-k Thin Films
Pawar, Namrata B., Mhaisagar, Yogesh S., Gaikwad, Anil S., Mahajan, Ashok M.Volume:
9
Language:
english
Journal:
Silicon
DOI:
10.1007/s12633-016-9475-z
Date:
May, 2017
File:
PDF, 3.11 MB
english, 2017